March Instruments PM-600 Plasma Treatment System
The PM-600 is a large barrel benchtop plasma system with a 13.56 MHz RF generator having an output power of up to 600W for stripping photoresist, cleaning substrates, and mild etching. It has a 10 in. diameter by 12 in. long quartz chamber with an 8 inch by 8 inch flat quartz glass substrate rack Quartz glass wafer racks are available for 3" diameter wafers. It is microprocessor based with automatic sequencing and manual override.
(TEMPORARILY OFF LINE)