Nanofabrication Cleanroom

Nanofabrication Cleanroom

Equipment and Processes

  • Thin Film Coating Lab
    • AJA International Orion 8 Sputtering System
    • CHA Electron Beam Evaporator with Cryopump
    • Wentworth MP-2300 Probe Station
    • Dektak 3 Profilometer
    • Keithley 4200 SCS Parametric Analyzer
    • March Instruments PM-600 Plasma Treatment System
    • Nikon Optophot Microscope with Infinity 2 Digital Camera
  • E-Beam Lithography Lab
    • JEOL JSM-7001F Ebeam Writer
  • Plasma Deposition/Etch Lab
    • STS Vision 310 PECVD System
    • STS Vision 320 RIE System
  • Photolithography Lab
    • Blue M Convection Oven
    • OAI 1000 Watt DUV Exposure System
    • Olympus BH2 Microscope with Infinity 2 Digital Camera
    • Suss MicroTec MA6 Mask Aligner
    • Brewer Science CEE 100CB Spin Coater
    • Developer Hood
  • Wet Chemistry Lab
    • Laminar Flow Bench
    • Solvent Rinse Hood
    • Wafer Cleaning Hood
    • Wafer Etching Hood
    • Gaertner L116C Ellipsometer

  • Equipment and Processes
    • Metalization Lab
    • E-Beam Lab
    • Deposition Etch Lab
    • Photolithography Lab
    • Wet Chemistry Lab
  • Floorplan
  • Lab Training
  • Rates & Services
  • Lab Cameras
  • Lab Scheduler Login
  • Lab User Registration
  • Environmental Sensors
  • MSDS
  • Directions to the Lab
  • Contact Us
  • Login
© 2020 University of Massachusetts Amherst.
This project was initially funded by the National Science Foundation Grant No. CMMI-1025020
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