Conte Nanotechnology Cleanroom Lab
Equipment and Processes
Metalization Lab
AJA International Orion 8 Sputtering System
CHA Electron Beam Evaporoator with Cryopump
Wentworth MP-2300 Probe Station
Dektak 3 Profilometer
Keithley 4200 SCS Parametric Analyzer
March Instruments PM-600 Plasma Treatment System
Nikon Optophot Microscope with Infinity 2 Digital Camera
E-Beam Lab
JEOL JSM-7001F Ebeam Writer
Deposition Etch Lab
STS Vision 310 PECVD System
STS Vision 320 RIE System
Photolithography Lab
Blue M Convection Oven
OAI 1000 Watt DUV Exposure System
Olympus BH2 Microscope with Infinity 2 Digital Camera
Suss MicroTec MA6 Mask Aligner
Brewer Science CEE 100CB Spin Coater
Developer Hood
Wet Chemistry Lab
Laminar Flow Bench
Solvent Rinse Hood
Wafer Cleaning Hood
Wafer Etching Hood
Gaertner L116C Ellipsometer
Equipment and Processes
Metalization Lab
E-Beam Lab
Deposition Etch Lab
Photolithography Lab
Wet Chemistry Lab
Floorplan
Lab Training
Facility Fees
Lab Cameras
Lab Scheduler Login
Lab User Registration
Environmental Sensors
MSDS
Directions to the Lab
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