Conte Nanotechnology Cleanroom Lab

Conte Nanotechnology Cleanroom Lab

The Center for Hierarchical Manufacturing's mission is to be a leading research and education center for the development of efficient process platforms and versatile tools for the two and three dimensional integration of components and systems across multiple length scales. The approach integrates nanofabrication processes for sub-30 nanometer elements based on directed self-assembly, nanoimprint lithography, high fidelity 3-D polymer template replication, and conformal deposition at the nanoscale, together with silicon wafer technologies and high-rate roll-to-roll based production tools, to yield materials and devices with unprecedented performance for computing, energy conversion and human health. As a comprehensive research center, the CHM includes research on device design, modeling and prototype testing in functional architectures taking best advantage of the specific hierarchical nanomanufacturing capabilities developed by the Center.

 AJA Orion8 sputtering System with Load Lock Chamber Suss Microtec MA6 Mask Aligner

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E-Beam Lab

Photolithography

  • JEOL JSM-7001F Ebeam Writer

  • Equipment and Processes
    • Metalization Lab
    • E-Beam Lab
    • Deposition Etch Lab
    • Photolithography Lab
    • Wet Chemistry Lab
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© 2013 University of Massachusetts Amherst.
Center for Hierarchical Manufacturing
This project is supported by the National Science Foundation Grant No. CMMI-1025020
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