Conte Nanotechnology Cleanroom Lab
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STS Vision 320 Mark II RIE System
STS Vision 320 Mark II PECVD System
Gaertner L116C Ellipsometer
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Equipment and Processes
Deposition Etch Lab
STS Vision 310 PECVD System
STS Vision 320 RIE System
Gaertner L116C Ellipsometer
