Nanofabrication Cleanroom

Nanofabrication Cleanroom

Equipment and Processes

E-Beam Lab

Photolithography

  • JEOL JSM-7001F Ebeam Writer

  • Equipment and Processes
    • Metalization Lab
    • E-Beam Lab
      • JEOL JSM-7001F Ebeam Writer
    • Deposition Etch Lab
    • Photolithography Lab
    • Wet Chemistry Lab
  • Floorplan
  • Lab Training
  • Rates & Services
  • Lab Cameras
  • Lab Scheduler Login
  • Lab User Registration
  • Environmental Sensors
  • MSDS
  • Directions to the Lab
  • Contact Us
  • Login
© 2020 University of Massachusetts Amherst.
This project was initially funded by the National Science Foundation Grant No. CMMI-1025020
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