Nanofabrication Cleanroom
Equipment and Processes
Metalization Lab
AJA International Orion 8 Sputtering System
CHA Electron Beam Evaporator with Cryopump
Cambridge NanoTech Savannah 100 Atomic Layer Deposition (ALD)
Wentworth MP-2300 Probe Station
Dektak 3 Profilometer
Keithley 4200 SCS Parametric Analyzer
March Instruments PM-600 Plasma Treatment System
Nikon Optophot Microscope with Infinity 2 Digital Camera
Equipment and Processes
Metalization Lab
AJA International Orion 8 Sputtering System
CHA Electron Beam Evaporator with Cryopump
Savannah 100 ALD
Wentworth MP-2300 Probe Station
Dektak 3 Profilometer
Keithley 4200 SCS Parametric Analyzer
March Instruments PM-600 Plasma Treatment System
Nikon Optophot Microscope with Infinity 2 Digital Camera
E-Beam Lab
Deposition Etch Lab
Photolithography Lab
Wet Chemistry Lab
Floorplan
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Lab Cameras
Lab Scheduler Login
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Environmental Sensors
MSDS
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