Conte Nanotechnology Cleanroom LabConte Nanotechnology Cleanroom Lab

  • Equipment and Processes
    • Metalization Lab
      • AJA International Orion 8 Sputtering System
      • CHA Electron Beam Evaporator with Cryopump
      • Savannah 100 ALD
      • Wentworth MP-2300 Probe Station
      • Dektak 3 Profilometer
      • Keithley 4200 SCS Parametric Analyzer
      • March Instruments PM-600 Plasma Treatment System
      • Nikon Optophot Microscope with Infinity 2 Digital Camera
    • E-Beam Lab
    • Deposition Etch Lab
    • Photolithography Lab
    • Wet Chemistry Lab
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Home › Equipment and Processes

Metalization Lab

Metalization Lab

  • AJA International Orion 8 Sputtering System
  • CHA Electron Beam Evaporator with Cryopump
  • Cambridge NanoTech Savannah 100 Atomic Layer Deposition (ALD)
  • Wentworth MP-2300 Probe Station
  • Dektak 3 Profilometer
  • Keithley 4200 SCS Parametric Analyzer
  • March Instruments PM-600 Plasma Treatment System
  • Nikon Optophot Microscope with Infinity 2 Digital Camera
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Center for Hierarchical Manufacturing
This project is supported by the National Science Foundation Grant No. CMMI-1025020
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