Nanofabrication Cleanroom

Nanofabrication Cleanroom

Equipment and Processes

Metalization Lab

Metalization Lab

  • AJA International Orion 8 Sputtering System
  • CHA Electron Beam Evaporator with Cryopump
  • Cambridge NanoTech Savannah 100 Atomic Layer Deposition (ALD)
  • Wentworth MP-2300 Probe Station
  • Dektak 3 Profilometer
  • Keithley 4200 SCS Parametric Analyzer
  • March Instruments PM-600 Plasma Treatment System
  • Nikon Optophot Microscope with Infinity 2 Digital Camera

  • Equipment and Processes
    • Metalization Lab
      • AJA International Orion 8 Sputtering System
      • CHA Electron Beam Evaporator with Cryopump
      • Savannah 100 ALD
      • Wentworth MP-2300 Probe Station
      • Dektak 3 Profilometer
      • Keithley 4200 SCS Parametric Analyzer
      • March Instruments PM-600 Plasma Treatment System
      • Nikon Optophot Microscope with Infinity 2 Digital Camera
    • E-Beam Lab
    • Deposition Etch Lab
    • Photolithography Lab
    • Wet Chemistry Lab
  • Floorplan
  • Lab Training
  • Rates & Services
  • Lab Cameras
  • Lab Scheduler Login
  • Lab User Registration
  • Environmental Sensors
  • MSDS
  • Directions to the Lab
  • Contact Us
  • Login
© 2020 University of Massachusetts Amherst.
This project was initially funded by the National Science Foundation Grant No. CMMI-1025020
site policies
login