Conte Nanotechnology Cleanroom LabConte Nanotechnology Cleanroom Lab

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    • Metalization Lab
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      • Blue M Convection Oven
      • OAI 1000 Watt DUV Exposure System
      • Olympus BH2 Microscope with Infinity 2 Digital Camera
      • Suss MicroTec MA6 Mask Aligner
      • Brewer Science CEE 100CB Spin Coater
      • Developer Hood
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Home › Equipment and Processes

Photolithography Lab

Photolithography

  • Blue M Convection Oven
  • OAI 1000 Watt DUV Exposure System
  • Olympus BH2 Microscope with Infinity 2 Digital Camera
  • Suss MicroTec MA6 Mask Aligner
  • Brewer Science CEE 100CB Spin Coater
  • Developer Hood
© 2013 University of Massachusetts Amherst.
Center for Hierarchical Manufacturing
This project is supported by the National Science Foundation Grant No. CMMI-1025020
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