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Cleanroom
06/16/2013 - 06/22/2013

May 2013
SMTWTFS
   1234
567891011
12131415161718
19202122232425
262728293031 
June 2013
SMTWTFS
      1
2345678
9101112131415
16171819202122
23242526272829
30      
July 2013
SMTWTFS
 123456
78910111213
14151617181920
21222324252627
28293031   
Sunday,
06/16/2013		 08:0009:0010:0011:0012:0013:0014:0015:0016:0017:0018:0019:0020:0021:0022:0023:00
                                                                
AJA International Orion 8 Sputtering System                           
Can Li
                                    
Cambridge NanoTech Savannah 100 ALD                                                                
CHA Electron Beam Evaporator                                                                
JEOL JSM-7001F Ebeam Writer                             
Shuang Pi
Can Li
                        
OAI 1000 Watt DUV Exposure System                                                                
Sonoplot GIX Microplotter II                                                                
Spin Coater                                                                
STS Vision 310 PECVD System                                                                
STS Vision 320 RIE System                                                                
Suss MicroTec MABA6 Mask Aligner                                                                
Wentworth MP-2300 Probe Station                           
Can Li
                                 

 

Monday,
06/17/2013		 08:0009:0010:0011:0012:0013:0014:0015:0016:0017:0018:0019:0020:0021:0022:0023:00
                                                                
AJA International Orion 8 Sputtering System                                                                
Cambridge NanoTech Savannah 100 ALD                                                                
CHA Electron Beam Evaporator                              
Rukshan Thantirige Fe/Al
                            
JEOL JSM-7001F Ebeam Writer                                                                
OAI 1000 Watt DUV Exposure System                                                                
Sonoplot GIX Microplotter II                                                                
Spin Coater                                                                
STS Vision 310 PECVD System                                                                
STS Vision 320 RIE System                                                                
Suss MicroTec MABA6 Mask Aligner                                                                
Wentworth MP-2300 Probe Station                                                                

 

Tuesday,
06/18/2013		 08:0009:0010:0011:0012:0013:0014:0015:0016:0017:0018:0019:0020:0021:0022:0023:00
                                                                
AJA International Orion 8 Sputtering System                            
Jinhua Mu
                                   
Cambridge NanoTech Savannah 100 ALD                                                                
CHA Electron Beam Evaporator            
Wenming Ju
  
Wenming Ju
                      
Peng Lin
                    
JEOL JSM-7001F Ebeam Writer            
Wenming Ju
     
Peng Lin
 
Jinhua Mu
 
Peng Lin
                
OAI 1000 Watt DUV Exposure System                                                                
Sonoplot GIX Microplotter II                                                                
Spin Coater        
Wenming Ju
                                                     
STS Vision 310 PECVD System                                                                
STS Vision 320 RIE System                                                                
Suss MicroTec MABA6 Mask Aligner                                                                
Wentworth MP-2300 Probe Station                                                                

 

Wednesday,
06/19/2013		 08:0009:0010:0011:0012:0013:0014:0015:0016:0017:0018:0019:0020:0021:0022:0023:00
                                                                
AJA International Orion 8 Sputtering System                                                                
Cambridge NanoTech Savannah 100 ALD                                                                
CHA Electron Beam Evaporator              
Wenming Ju
        
Wenming Ju
  
Rukshan Thantirige Fe/Ag
    
Martin Muthee
                 
JEOL JSM-7001F Ebeam Writer        
Peng Lin
 
Martin Muthee
Wenming Ju
  
Jaewon Choi
Jaewon Choi
Jaewon Choi
  
Martin Muthee
                      
OAI 1000 Watt DUV Exposure System                                                                
Sonoplot GIX Microplotter II                                                                
Spin Coater              
Wenming Ju
                                                
STS Vision 310 PECVD System                                                                
STS Vision 320 RIE System                                                                
Suss MicroTec MABA6 Mask Aligner                                                                
Wentworth MP-2300 Probe Station                                                                

 

Thursday,
06/20/2013		 08:0009:0010:0011:0012:0013:0014:0015:0016:0017:0018:0019:0020:0021:0022:0023:00
                                                                
AJA International Orion 8 Sputtering System                                                                
Cambridge NanoTech Savannah 100 ALD                                                                
CHA Electron Beam Evaporator                                                                
JEOL JSM-7001F Ebeam Writer                        
Peng Lin
                                
OAI 1000 Watt DUV Exposure System                                                                
Sonoplot GIX Microplotter II                                                                
Spin Coater                                                                
STS Vision 310 PECVD System                       
Peng Lin
                                       
STS Vision 320 RIE System                                                                
Suss MicroTec MABA6 Mask Aligner                                                                
Wentworth MP-2300 Probe Station                                                                

 

Friday,
06/21/2013		 08:0009:0010:0011:0012:0013:0014:0015:0016:0017:0018:0019:0020:0021:0022:0023:00
                                                                
AJA International Orion 8 Sputtering System                                                                
Cambridge NanoTech Savannah 100 ALD                                                                
CHA Electron Beam Evaporator                                                                
JEOL JSM-7001F Ebeam Writer                                                                
OAI 1000 Watt DUV Exposure System                                                                
Sonoplot GIX Microplotter II                                                                
Spin Coater                                                                
STS Vision 310 PECVD System                                                                
STS Vision 320 RIE System                                                                
Suss MicroTec MABA6 Mask Aligner                                                                
Wentworth MP-2300 Probe Station                                                                

 

Saturday,
06/22/2013		 08:0009:0010:0011:0012:0013:0014:0015:0016:0017:0018:0019:0020:0021:0022:0023:00
                                                                
AJA International Orion 8 Sputtering System                                                                
Cambridge NanoTech Savannah 100 ALD                                                                
CHA Electron Beam Evaporator                                                                
JEOL JSM-7001F Ebeam Writer                                                                
OAI 1000 Watt DUV Exposure System                                                                
Sonoplot GIX Microplotter II                                                                
Spin Coater                                                                
STS Vision 310 PECVD System                                                                
STS Vision 320 RIE System                                                                
Suss MicroTec MABA6 Mask Aligner                                                                
Wentworth MP-2300 Probe Station                                                                

 

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