Nanofabrication Cleanroom

Located on the 1st floor in the Silvio O. Conte National Center for Polymer Research the Nanofabrication facility is part of a network of cleanroom laboratories that offer both unique and complimentary capabilities. Training can be tailored to the specific set of processes or techniques needed to fabricate and test various devices or materials. Films of numerous metals and ceramics can be applied and patterning as small as 10 nm can be accomplished. A wet chemistry area provides a safe environment for the use of a variety of coatings, solvents, and etchants.

The facility accepts samples and will perform requested analysis. We offer training to users to conduct experimentation for use on a fee for service basis to both internal and external researchers, academic or industry based. Following an initial consultation, covering experimental parameters training and access is arranged through the director.

1,400 sq. ft. Class 100 clean room (Conte B-132)

Metallization

• E-beam evaporation
• Sputtering

Deposition and Etch

• Deposition of Si, SiO2, Si3N4, amorphous Si
• Etching of Si and derivatives, resists, ITO, etc.

Lithography

• DUV Flood Exposure system
• Suss Microtec MA6 mask aligner
• E-beam writing

Wet Chemistry

• Acid etch
• Solvent rinse
• Wafer cleaning
• Electroplating

Metrology

• Optical microscopy
• Ellipsometry
• Profilometry
• Wafer probing